Concepedia

Projection Lithography

Projection Lithography is a photolithographic technique in semiconductor manufacturing that belongs to the class of pattern transfer methods, distinguished by its use of an optical projection system to selectively expose a photosensitive resist layer through a mask, thereby replicating microscopic circuit patterns onto a substrate with high resolution and precision.

304

Publications

10.6K

Citations

1.2K

Authors

223

Institutions

Publications per year

2017–2026

29

Variants

Projection Printing

Parents

Publications

304

Application of visible light-based projection stereolithography for live cell-scaffold fabrication with designed architecture

Hang Lin, Dongning Zhang, Peter G. Alexander et al. · Biomaterials · 2012 · 383 citations · Full text

, , +14

All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography

Joon‐Suh Park, Shuyan Zhang, Alan She et al. · Nano Letters · 2019 · 299 citations

, , +17

Modeling projection printing of positive photoresists

F.H. Dill, Andrew R. Neureuther, Joshua Tuttle et al. · IEEE Transactions on Electron Devices · 1975 · 232 citations

, , +12

A general simulator for VLSI lithography and etching processes: Part I—Application to projection lithography

W.G. Oldham, S.N. Nandgaonkar, Andrew R. Neureuther et al. · IEEE Transactions on Electron Devices · 1979 · 216 citations

, , +15

Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production

Kanti Jain, Marc Klosner, M. Zemel et al. · Proceedings of the IEEE · 2005 · 205 citations

, , +13

1–5 of 304

Authors

1.2K

  1. GS
    G. Stengl

    IMS Nanofabrication (Austria), Austria

    15 publications · 236 citations

    12

    h-index

  2. WK
    W. K. Waskiewicz

    AT&T (United States), United States

    17 publications · 289 citations

    12

    h-index

  3. DL
    David L. Windt

    Reflective X Ray Optics, United States

    11 publications · 192 citations

    11

    h-index

  4. HL
    H. Löschner

    IMS Nanofabrication (Austria), Austria

    12 publications · 169 citations

    10

    h-index

  5. JA
    J. Alexander Liddle

    Lawrence Berkeley National Laboratory, United States

    10 publications · 226 citations

    10

    h-index

1–5 of 1.2K

Institutions

223

  1. AT&T (United States)

    Bedminster, United States

    16 h-index

    199 publications

    4.4K citations

  2. Lawrence Livermore National Laboratory

    Livermore, United States

    15 h-index

    49 publications

    2K citations

  3. Lawrence Berkeley National Laboratory

    Berkeley, United States

    13 h-index

    48 publications

    2.3K citations

  4. IMS Nanofabrication (Austria)

    Vienna, Austria

    12 h-index

    89 publications

    1.4K citations

  5. University of California, Berkeley

    Berkeley, United States

    11 h-index

    36 publications

    2.5K citations

  6. IBM (United States)

    Armonk, United States

    11 h-index

    47 publications

    1.9K citations

  7. Massachusetts Institute of Technology

    Cambridge, United States

    10 h-index

    38 publications

    1.5K citations

  8. Sandia National Laboratories California

    Livermore, United States

    9 h-index

    54 publications

    1.4K citations

1–8 of 223

Venues

  1. 23

    h-index

  2. 20

    h-index

  3. Applied Optics

    20 publications · 597 citations

    15

    h-index

  4. Microelectronic Engineering

    16 publications · 337 citations

    12

    h-index

  5. IEEE Transactions on Electron Devices

    9 publications · 562 citations

    9

    h-index

1–5