Concepedia

Andrew R. Neureuther

AR

85

Publications

2.7K

Citations

28

H-Index

1968

Active since

Affiliations

University of California, Berkeley(Current)

Lawrence Berkeley National Laboratory

University of California System

Andrew R. Neureuther is an author at University of California, Berkeley specializing in engineering, applied physics, and natural sciences.

Top concepts

Publications per year

1968–2022

85

Publications

85

Modeling projection printing of positive photoresists

F.H. Dill, Andrew R. Neureuther, Joshua Tuttle et al. · IEEE Transactions on Electron Devices · 1975 · 232 citations

, , +15

A general simulator for VLSI lithography and etching processes: Part I—Application to projection lithography

W.G. Oldham, S.N. Nandgaonkar, Andrew R. Neureuther et al. · IEEE Transactions on Electron Devices · 1979 · 214 citations

Self-Organized Silver Nanoparticles for Three-Dimensional Plasmonic Crystals

Andrea R. Tao, Daniel P. Ceperley, Prasert Sinsermsuksakul et al. · Nano Letters · 2008 · 182 citations

, , +15

A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etching

W.G. Oldham, Andrew R. Neureuther, Chiakang Sung et al. · IEEE Transactions on Electron Devices · 1980 · 121 citations

Line‐Profile resist development simulation techniques

R. Jewett, Paul Isaac Hagouel, Andrew R. Neureuther et al. · Polymer Engineering and Science · 1977 · 111 citations

, , +18

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