Concepedia

Process Control Metrology

Process Control Metrology is a metrological framework within microfabrication that systematically characterizes and monitors manufacturing variations during production to ensure process stability and device conformity through real-time measurement and feedback.

62

Publications

2.1K

Citations

247

Authors

66

Institutions

Publications per year

2017–2026

6

Parents

Publications

62

Process control and end-point determination of a fluid bed granulation by application of near infra-red spectroscopy

Paul Frake, D. Greenhalgh, Scott Grierson et al. · International Journal of Pharmaceutics · 1997 · 222 citations

, , +8

<i>Ultrasonic Measurements for Process Control: Theory, Techniques</i>, <i>Applications</i>

Lawrence C. Lynnworth, Emmanuel P. Papadakis · The Journal of the Acoustical Society of America · 1990 · 121 citations

, , +11

Instrument engineers' handbook: process measurement and analysis

Choice Reviews Online · 1995 · 109 citations

, , +16

Virtual metrology: a solution for wafer to wafer advanced process control

P. T. Chen, S.Y. Wu, Junshien Lin et al. · 2005 · 99 citations

, , +10

On-line titration of volatile fatty acids for the process control of anaerobic digestion plants

H. Feitkenhauer, Jürgen von Sachs, Ulrich Meyer · Water Research · 2002 · 78 citations

, , +14

1–5 of 62

Authors

247

  1. FC
    Fan‐Tien Cheng

    National Cheng Kung University, Taiwan

    4 publications · 113 citations

    4

    h-index

  2. NS
    Nobuhiro Shinohara

    Nagaoka University of Technology, Japan

    1 publications · 34 citations

    2

    h-index

  3. YS
    Yu-Chuan Su

    National Tsing Hua University, Taiwan

    2 publications · 72 citations

    2

    h-index

  4. BB
    Benjamin Bunday

    National Institute of Standards and Technology, United States

    2 publications · 40 citations

    2

    h-index

  5. TL
    Tung-Ho Lin

    National Cheng Kung University, Taiwan

    2 publications · 72 citations

    2

    h-index

1–5 of 247

Institutions

66

  1. National Cheng Kung University

    Tainan City, Taiwan

    3 h-index

    11 publications

    202 citations

  2. Far East University

    Tainan City, Taiwan

    3 h-index

    3 publications

    90 citations

  3. FZI Research Center for Information Technology

    Karlsruhe, Germany

    2 h-index

    3 publications

    48 citations

  4. ASML (Netherlands)

    Veldhoven, The Netherlands

    2 h-index

    26 publications

    521 citations

  5. National Institute of Standards and Technology

    Gaithersburg, United States

    2 h-index

    4 publications

    246 citations

  6. Tokyo Electron (Japan)

    Tokyo, Japan

    2 h-index

    2 publications

    32 citations

  7. Taiwan Semiconductor Manufacturing Company (Taiwan)

    Hsinchu, Taiwan

    2 h-index

    16 publications

    960 citations

  8. National Yang Ming Chiao Tung University

    Hsinchu, Taiwan

    1 h-index

    2 publications

    122 citations

1–8 of 66

Venues

  1. 6

    h-index

  2. 4

    h-index

  3. 4

    h-index

  4. 3

    h-index

  5. Choice Reviews Online

    CRO · 2 publications · 147 citations

    2

    h-index

1–5