Concepedia
Statistics
Publications
7
Citations
299
H-Index
Active since
2006
Affiliations
National Cheng Kung University(Current)
National Chung Shan Institute of Science and Technology
National Defense University
Far East University
Tung-Ho Lin is an author at National Cheng Kung University specializing in engineering, industrial engineering, and systems engineering.
Top concepts
EngineeringSystems EngineeringIndustrial EngineeringMetrologyComputer EngineeringCalibrationComputer-aided DesignModeling And SimulationMeasurementGeometry Modeling
Publications per year
2006–2011
A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing
Min‐Hsiung Hung, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE/ASME Transactions on Mechatronics · 2007 · 112 citations
Virtual Manufacturing, Virtual Metrology Model, Engineering +20
Accuracy and Real-Time Considerations for Implementing Various Virtual Metrology Algorithms
Yu-Chuan Su, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 60 citations
Engineering, Measurement, Industrial Engineering +24
A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing
Tung-Ho Lin, Min‐Hsiung Hung, Rung-Chuan Lin et al. · 2006 · 39 citations
Virtual Manufacturing, Real-time Monitoring, Engineering +26
NN-Based Key-Variable Selection Method for Enhancing Virtual Metrology Accuracy
Tung-Ho Lin, Fan‐Tien Cheng, Weiming Wu et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 38 citations
Virtual Metrology Accuracy, Engineering, Virtual Sensor +13
Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy
Weiming Wu, Fan‐Tien Cheng, Tung-Ho Lin et al. · IEEE Transactions on Automation Science and Engineering · 2010 · 27 citations
Selection Schemes, Engineering, Machine Learning +14
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