Tung-Ho Lin

Statistics

Publications

Citations

303

H-Index

Active since

2006

Affiliations

National Cheng Kung University(Current)

National Chung Shan Institute of Science and Technology

National Defense University

Far East University

Tung-Ho Lin is an author at National Cheng Kung University specializing in manufacturing engineering, industrial metrology, and manufacturing metrology.

Publications per year

2006–2011

Publications

A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing

Min‐Hsiung Hung, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE/ASME Transactions on Mechatronics · 2007 · 115 citations

Engineering, Industrial Engineering, Manufacturing Engineering +15

Accuracy and Real-Time Considerations for Implementing Various Virtual Metrology Algorithms

Yu-Chuan Su, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 61 citations

Engineering, Computer Science, Manufacturing Engineering +15

A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Tung-Ho Lin, Min‐Hsiung Hung, Rung-Chuan Lin et al. · 2006 · 39 citations

Engineering, Manufacturing Engineering, Machine Learning +15

NN-Based Key-Variable Selection Method for Enhancing Virtual Metrology Accuracy

Tung-Ho Lin, Fan‐Tien Cheng, Weiming Wu et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 38 citations

Computing, Industrial Engineering, Manufacturing Engineering +8

Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy

Weiming Wu, Fan‐Tien Cheng, Tung-Ho Lin et al. · IEEE Transactions on Automation Science and Engineering · 2010 · 27 citations

Computing, Computer Science, Manufacturing Engineering +13

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