Concepedia

Rung-Chuan Lin

RL

Statistics

Publications

2

Citations

151

H-Index

2

Active since

2006

Affiliations

National Defense University(Current)

National Cheng Kung University

Rung-Chuan Lin is an author at National Defense University specializing in geometric modeling, metrology, and modeling and simulation.

Top concepts

Publications per year

2006–2007

2

Publications

2

A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing

Min‐Hsiung Hung, Tung-Ho Lin, Fan‐Tien Cheng et al. · IEEE/ASME Transactions on Mechatronics · 2007 · 112 citations

, , +20

A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Tung-Ho Lin, Min‐Hsiung Hung, Rung-Chuan Lin et al. · 2006 · 39 citations

, , +26

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