Concepedia

Line Patterning

Line Patterning is a lithographic fabrication technique within interconnect formation that defines the geometric arrangement of conductive pathways on a semiconductor substrate by selectively transferring a patterned resist mask onto an underlying thin film layer through etching or deposition processes.

103

Publications

3.5K

Citations

504

Authors

132

Institutions

Publications per year

2017–2026

12

Parents

Publications

103

Interword distance changes represented by sine waves for watermarking text images

Ding Huang, Hong Yan · IEEE Transactions on Circuits and Systems for Video Technology · 2001 · 209 citations

, , +13

Plastic Electronic Devices Through Line Patterning of Conducting Polymers

Dirk Hohnholz, Hidenori Okuzaki, Alan G. MacDiarmid · Advanced Functional Materials · 2005 · 188 citations

, , +17

Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers

Yulin Shen, S. Suresh, I. A. Blech · Journal of Applied Physics · 1996 · 152 citations

, , +17

22nm half-pitch patterning by CVD spacer self alignment double patterning (SADP)

Chris Bencher, Yong Mei Chen, Huixiong Dai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 129 citations

, , +17

10nm lines and spaces written in HSQ, using electron beam lithography

A.E. Grigorescu, Marco C. van der Krogt, P. Kruit · Microelectronic Engineering · 2007 · 107 citations

, , +7

1–5 of 103

Authors

504

  1. HO
    Hidenori Okuzaki

    University of Yamanashi, Japan

    4 publications · 320 citations

    4

    h-index

  2. YE
    Yasin Ekinci

    Paul Scherrer Institute, Switzerland

    4 publications · 179 citations

    4

    h-index

  3. AG
    Alan G. MacDiarmid

    University of Pennsylvania, United States

    3 publications · 303 citations

    3

    h-index

  4. RG
    Roel Gronheid

    IMEC, Belgium

    3 publications · 60 citations

    3

    h-index

  5. DM
    Dionysios Manessis

    Fraunhofer Institute for Reliability and Microintegration, Germany

    3 publications · 77 citations

    3

    h-index

1–5 of 504

Institutions

132

  1. IMEC

    Leuven, Belgium

    6 h-index

    49 publications

    1.2K citations

  2. Massachusetts Institute of Technology

    Cambridge, United States

    5 h-index

    11 publications

    812 citations

  3. Imec the Netherlands

    Eindhoven, Netherlands

    5 h-index

    13 publications

    372 citations

  4. Paul Scherrer Institute

    Villigen, Switzerland

    4 h-index

    12 publications

    560 citations

  5. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    4 h-index

    8 publications

    127 citations

  6. Tokyo Electron (Japan)

    Tokyo, Japan

    4 h-index

    36 publications

    841 citations

  7. University of Yamanashi

    Kofu, Japan

    3 h-index

    9 publications

    528 citations

  8. University of Chicago

    Chicago, United States

    3 h-index

    8 publications

    104 citations

1–8 of 132

Venues

  1. 14

    h-index

  2. Applied Physics Letters

    7 publications · 359 citations

    7

    h-index

  3. Microelectronic Engineering

    7 publications · 271 citations

    7

    h-index

  4. 3

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 3 publications · 86 citations

    3

    h-index

1–5