Concepedia

Marco C. van der Krogt

MC

Statistics

Publications

4

Citations

162

H-Index

4

Active since

2007

Affiliations

Delft University of Technology(Current)

Marco C. van der Krogt is an author at Delft University of Technology specializing in engineering, applied physics, and microelectronics.

Top concepts

Publications per year

2007–2007

4

Publications

4

10nm lines and spaces written in HSQ, using electron beam lithography

A.E. Grigorescu, Marco C. van der Krogt, P. Kruit · Microelectronic Engineering · 2007 · 107 citations

, , +9

Influence of the development process on ultimate resolution electron beam lithography, using ultrathin hydrogen silsesquioxane resist layers

A.E. Grigorescu, Marco C. van der Krogt, P. Kruit · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 25 citations

, , +14

Sub-10-nm structures written in ultra-thin HSQ resist layers using electron-beam lithography

A.E. Grigorescu, Marco C. van der Krogt · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

, , +14

Limiting factors for electron beam lithography when using ultra-thin hydrogen silsesquioxane layers

Marco C. van der Krogt · Journal of Micro/Nanolithography MEMS and MOEMS · 2007 · 13 citations · Full text

, , +18

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