Concepedia

Defect Metrology

Defect Metrology is a systematic analytical framework within semiconductor science that quantifies and characterizes structural imperfections in crystalline materials through precise measurement techniques, distinguishing itself by enabling the correlation of defect density, type, and distribution with device performance and yield.

187

Publications

5.8K

Citations

757

Authors

249

Institutions

Publications per year

2017–2026

34

Parents

Publications

187

The defect correction principle and discretization methods

Hans J. Stetter · Numerische Mathematik · 1978 · 279 citations

, , +14

Springer handbook of materials measurement methods

Materials Today · 2006 · 187 citations · Full text

, , +17

Bridging defects resistance measurements in a CMOS process

R. Rodríguez‐Montañés, E.M.J.G. Bruis, J. Figueras · 1992 · 181 citations

, , +12

First-Principles Calculations of Point Defects for Quantum Technologies

Cyrus E. Dreyer, Audrius Alkauskas, John L. Lyons et al. · Annual Review of Materials Research · 2018 · 170 citations · Full text

, , +17

Towards a unified view of polytypism in silicon carbide

Graham R. Fisher, P. Barnes · Philosophical Magazine B · 1990 · 152 citations

, , +17

1–5 of 187

Authors

757

  1. BB
    Benjamin Bunday

    National Institute of Standards and Technology, United States

    7 publications · 205 citations

    7

    h-index

  2. AA
    Abraham Arceo

    IBM (United States), United States

    4 publications · 100 citations

    4

    h-index

  3. ES
    Eric Solecky

    GlobalFoundries (United States), United States

    4 publications · 128 citations

    4

    h-index

  4. AV
    Alok Vaid

    GlobalFoundries (United States), United States

    4 publications · 120 citations

    4

    h-index

  5. LA
    L. A. Bursill

    The University of Melbourne, Australia

    3 publications · 75 citations

    3

    h-index

1–5 of 757

Institutions

249

  1. IMEC

    Leuven, Belgium

    9 h-index

    44 publications

    939 citations

  2. National Laboratory of the Rockies

    Golden, United States

    4 h-index

    9 publications

    197 citations

  3. GlobalFoundries (United States)

    Santa Clara, United States

    4 h-index

    18 publications

    510 citations

  4. University of Tennessee at Knoxville

    Knoxville, United States

    3 h-index

    6 publications

    205 citations

  5. The University of Melbourne

    Melbourne, Australia

    3 h-index

    6 publications

    153 citations

  6. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    3 h-index

    8 publications

    138 citations

  7. Institute for Technical Physics and Materials Science

    Budapest, Hungary

    3 h-index

    7 publications

    89 citations

  8. Oak Ridge National Laboratory

    Oak Ridge, United States

    3 h-index

    5 publications

    136 citations

1–8 of 249

Venues

  1. 13

    h-index

  2. Journal of Crystal Growth

    10 publications · 176 citations

    10

    h-index

  3. physica status solidi (a)

    8 publications · 176 citations

    8

    h-index

  4. 5

    h-index

  5. Journal of Applied Physics

    4 publications · 134 citations

    4

    h-index

1–5