Concepedia

Bilayer Resist Systems

Bilayer Resist Systems is a photolithographic resist architecture consisting of two distinct functional polymer layers—an upper imaging layer and a lower planarization or adhesion-promoting layer—that together enable high-resolution pattern transfer in thin film lithography by combining the etch resistance of a bottom layer with the sensitivity and resolution of a top imaging layer.

52

Publications

1.3K

Citations

237

Authors

62

Institutions

Publications per year

2017–2026

1

Parents

Publications

52

Hydrogen silsesquioxane/novolak bilayer resist for high aspect ratio nanoscale electron-beam lithography

F.C.M.J.M. van Delft, J. Weterings, A. K. van Langen-Suurling et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 111 citations

, , +14

Fabrication of silicon and metal nanowires and dots using mechanical atomic force lithography

Sijung Hu, Amin Hamidi, Stefan Altmeyer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 82 citations

, , +16

Electron beam lithography of HSQ/PMMA bilayer resists for negative tone lift-off process

Haifang Yang, Aizi Jin, Qiang Luo et al. · Microelectronic Engineering · 2008 · 65 citations

, , +13

Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography

Masami Kakuchi, Makoto Hikita, Toshiaki Tamamura · Applied Physics Letters · 1986 · 55 citations

, , +17

Bilayer Resist Method for Room-Temperature Nanoimprint Lithography

Ken-ichiro Nakamatsu, Keiichiro Watanabe, Katsuhiko Tone et al. · Japanese Journal of Applied Physics · 2004 · 43 citations

, , +13

1–5 of 52

Authors

237

  1. GM
    Gregory M. Wallraff

    IBM Research - Almaden, United States

    4 publications · 58 citations

    4

    h-index

  2. MA
    Marie Angelopoulos

    IBM Research - Thomas J. Watson Research Center, United States

    3 publications · 58 citations

    3

    h-index

  3. PA
    Panagiotis Argitis

    National Centre of Scientific Research "Demokritos", Greece

    3 publications · 66 citations

    3

    h-index

  4. RS
    Recai Sezi

    Siemens (Germany), Germany

    3 publications · 45 citations

    3

    h-index

  5. RL
    R. Leuschner

    Siemens (Germany), Germany

    3 publications · 45 citations

    3

    h-index

1–5 of 237

Institutions

62

  1. IBM Research - Almaden

    San Jose, United States

    6 h-index

    25 publications

    471 citations

  2. MIT Lincoln Laboratory

    Lexington, United States

    4 h-index

    8 publications

    129 citations

  3. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    3 h-index

    13 publications

    189 citations

  4. University of Glasgow

    Glasgow, United Kingdom

    3 h-index

    11 publications

    186 citations

  5. NTT (Japan)

    Tokyo, Japan

    3 h-index

    10 publications

    298 citations

  6. NEC (Japan)

    Tokyo, Japan

    3 h-index

    11 publications

    301 citations

  7. Siemens (Germany)

    Munich, Germany

    3 h-index

    17 publications

    259 citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    3 h-index

    7 publications

    116 citations

1–8 of 62

Venues

  1. 14

    h-index

  2. 8

    h-index

  3. 5

    h-index

  4. Microelectronic Engineering

    3 publications · 138 citations

    3

    h-index

  5. 2

    h-index

1–5