Concepedia

Recai Sezi

RS

6

Publications

96

Citations

6

H-Index

1989

Active since

Affiliations

Siemens (Germany)(Current)

Recai Sezi is an author at Siemens (Germany) specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationChemistrySurface ScienceChemical EngineeringMicroelectronicsMaterials EngineeringEducation

Publications per year

1989–1996

6

Publications

6

Photopatternable insulating materials

Hellmut Ahne, Roland Rubner, Recai Sezi · Applied Surface Science · 1996 · 23 citations

Materials Science, Materials Engineering, Optical Materials +7

<title>Application aspects of the Si-CARL bilayer process</title>

Michael Sebald, Joerg Berthold, M. Beyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 16 citations

Electrical Engineering, Engineering, Microfabrication +12

Benefits and prospects of aqueous silylation for novel dry developable high-resolution resists

Recai Sezi, Michael Sebald, R. Leuschner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations

Engineering, Base Resin, Chemistry +16

Silicon containing photoresists for half micron lithography

Recai Sezi, Michael Sebald, R. Leuschner · Polymer Engineering and Science · 1989 · 15 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +17

Chemical amplification of resist lines: a novel sub-half-micron bilayer resist tehnique for NUV and deep-UV lithography

Michael Sebald, R. Leuschner, Recai Sezi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 14 citations

Engineering, Electron-beam Lithography, Deep-uv Lithography +22

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