Concepedia

R. Leuschner

RL

8

Publications

142

Citations

8

H-Index

1989

Active since

Affiliations

Siemens (Germany)(Current)

Friedrich-Alexander-Universität Erlangen-Nürnberg

R. Leuschner is an author at Siemens (Germany) specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMaterial ScienceMicrofabricationChemistryApplied PhysicsSurface ScienceMicroelectronicsChemical EngineeringNanotechnologyNanoelectronics

Publications per year

1989–1996

8

Publications

8

Recent advances in photosensitive polyimides

Hellmut Ahne, R. Leuschner, Roland Rubner · Polymers for Advanced Technologies · 1993 · 33 citations

Materials Science, Chemical Engineering, Optical Materials +14

Scanning tunneling microscopy based lithography employing amorphous hydrogenated carbon as a high resolution resist mask

K. Kragler, Elena Günther, R. Leuschner et al. · Applied Physics Letters · 1995 · 24 citations

Engineering, Electron-beam Lithography, Microscopy +20

<title>Application aspects of the Si-CARL bilayer process</title>

Michael Sebald, Joerg Berthold, M. Beyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 16 citations

Electrical Engineering, Engineering, Microfabrication +12

Benefits and prospects of aqueous silylation for novel dry developable high-resolution resists

Recai Sezi, Michael Sebald, R. Leuschner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations

Engineering, Base Resin, Chemistry +16

Silicon containing photoresists for half micron lithography

Recai Sezi, Michael Sebald, R. Leuschner · Polymer Engineering and Science · 1989 · 15 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +17

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