Concepedia

Hellmut Ahne

HA

6

Publications

114

Citations

6

H-Index

1990

Active since

Affiliations

Siemens (Germany)(Current)

Hellmut Ahne is an author at Siemens (Germany) specializing in engineering, chemistry, and chemical engineering.

Top concepts

EngineeringChemistryMaterial ScienceChemical EngineeringApplied PhysicsMicrofabricationPhotochemistrySurface ScienceMicroelectronicsOptical Materials

Publications per year

1990–1996

6

Publications

6

Recent advances in photosensitive polyimides

Hellmut Ahne, R. Leuschner, Roland Rubner · Polymers for Advanced Technologies · 1993 · 33 citations

Materials Science, Chemical Engineering, Optical Materials +14

Photopatternable insulating materials

Hellmut Ahne, Roland Rubner, Recai Sezi · Applied Surface Science · 1996 · 23 citations

Materials Science, Materials Engineering, Optical Materials +7

<title>Application aspects of the Si-CARL bilayer process</title>

Michael Sebald, Joerg Berthold, M. Beyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 16 citations

Electrical Engineering, Engineering, Microfabrication +12

Benefits and prospects of aqueous silylation for novel dry developable high-resolution resists

Recai Sezi, Michael Sebald, R. Leuschner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations

Engineering, Base Resin, Chemistry +16

Chemical amplification of resist lines: a novel sub-half-micron bilayer resist tehnique for NUV and deep-UV lithography

Michael Sebald, R. Leuschner, Recai Sezi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 14 citations

Engineering, Electron-beam Lithography, Deep-uv Lithography +22

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