Kazuyoshi Sugihara

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi et al. · Japanese Journal of Applied Physics · 2004 · 80 citations

Engineering, Silicon-on-nothing Structure, Micro-optical Component +21

Overlay of semi-dried functional layers in offset printing for rapid and high-precision fabrication of flexible TFTs

Yasuyuki Kusaka, Kazuyoshi Sugihara, Masayoshi Koutake et al. · Journal of Micromechanics and Microengineering · 2014 · 43 citations

Engineering, Flexible Manufacturing Technology, Flexible Tfts +17

Piezoelectrically driven <i>X</i> <i>Y</i>θ table for submicron lithography systems

Kazuyoshi Sugihara, Ichiro Mori, Toru Tojo et al. · Review of Scientific Instruments · 1989 · 36 citations

Submicron Lithography Systems, Electronic Devices, Engineering +15

A finite element approach to a coupled structural-acoustic radiation system with application to loudspeaker characteristic calculation

Y. Kagawa, Tatsuo Yamabuchi, Kazuyoshi Sugihara et al. · Journal of Sound and Vibration · 1980 · 26 citations

Aeroacoustics, Finite Element Approach, Engineering +11

Throughput enhancement strategy of maskless electron beam direct writing for logic device

Ryoichi Inanami, S. Magoshi, S. Kousai et al. · 2002 · 26 citations

Electrical Engineering, Physical Design (Electronics), Engineering +12