Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi, +6

Japanese Journal of Applied Physics

EngineeringSilicon-on-nothing StructureMicro-optical ComponentSilicon On InsulatorWafer Scale Processing +19

Overlay of semi-dried functional layers in offset printing for rapid and high-precision fabrication of flexible TFTs

Yasuyuki Kusaka, Kazuyoshi Sugihara, Masayoshi Koutake, +1

Journal of Micromechanics and Microengineering

EngineeringFlexible Manufacturing TechnologyFlexible TftsMechanical EngineeringFlexible Sensor +15

Piezoelectrically driven <i>X</i> <i>Y</i>θ table for submicron lithography systems

Kazuyoshi Sugihara, Ichiro Mori, Toru Tojo, +3

Review of Scientific Instruments

Submicron Lithography SystemsElectronic DevicesEngineeringMechanical ControlMicrofabrication +13

A finite element approach to a coupled structural-acoustic radiation system with application to loudspeaker characteristic calculation

Y. Kagawa, Tatsuo Yamabuchi, Kazuyoshi Sugihara, +1

Journal of Sound and Vibration

AeroacousticsFinite Element ApproachEngineeringPhysical AcousticMechanical Engineering +9

Throughput enhancement strategy of maskless electron beam direct writing for logic device

Ryoichi Inanami, S. Magoshi, S. Kousai, +5

Electrical EngineeringPhysical Design (Electronics)EngineeringVlsi DesignCircuit Design +10

Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam

Masataka Ogasawara, Mitsuyo Kariya, Hiroko Nakamura, +12

Applied Physics Letters

Optical MaterialsEngineeringSilicon OxideOptoelectronic DevicesIntegrated Circuits +18

Maskless lithography: estimation of the number of shots for each layer in a logic device with character-projection-type low-energy electron-beam direct writing system

Ryoichi Inanami, Shunko Magoshi, Shouhei Kousai, +5

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyElectronic Design AutomationElectronic DesignComputer Architecture +17

Imaging of dimer atoms of Si(100) with the scanning tunneling microscope

Kazuyoshi Sugihara, Akihiro Sakai, Yushi Kato, +4

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringMicroscopyDimer AtomsCurrent Dimer ModelsTunneling Microscopy +15

&lt;title&gt;New registration technique using voltage-contrast images for low-energy electron-beam lithography&lt;/title&gt;

Tetsuro Nakasugi, Atsushi Ando, Kazuyoshi Sugihara, +2

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyMicroscopyVoltage Contrast ImageElectron Microscopy +15

Stencil mask ion implantation technology

T. Shibata, K. Suguro, Kazuyoshi Sugihara, +3

IEEE Transactions on Semiconductor Manufacturing

Electrical EngineeringIon ImplantationResist MaskEngineeringWafer Scale Processing +12