Concepedia

Shuichi Taniguchi

ST

1

Publications

80

Citations

1

H-Index

2004

Active since

Affiliations

Toshiba (Japan)(Current)

Shuichi Taniguchi is an author at Toshiba (Japan) specializing in nanoelectronics, microelectronics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingFlexible ElectronicsMaterials Engineering

Publications per year

2004–2004

1

Publications

1

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi et al. · Japanese Journal of Applied Physics · 2004 · 80 citations

Engineering, Silicon-on-nothing Structure, Micro-optical Component +21

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