Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm

J. E. Bjorkholm, Jeffrey Bokor, L. Eichner, +14

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Optical MaterialsX-ray SpectroscopyEngineeringElectron-beam LithographyMicroscopy +21

Scaling of Si and GaAs trench etch rates with aspect ratio, feature width, and substrate temperature

Andrew D. Bailey, M. C. M. van de Sanden, J. Greguš, +1

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringElectron-beam LithographyVacuum DeviceSilicon On InsulatorLangmuir Adsorption Kinetics +15

Multiple steady states in electron cyclotron resonance plasma reactors

Eray S. Aydil, J. Greguš, Richard A. Gottscho

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringMultiple Steady StatesPlasma SciencePlasma PhysicsElectron Cyclotron Resonance +15

Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors

Eray S. Aydil, B. Quiniou, J.T.C Lee, +2

Materials Science in Semiconductor Processing

EngineeringPhysicsSurface ScienceApplied PhysicsPlasma Science +6

Silicon-on-silicon integration of a GSM transceiver with VCO resonator

P. Davis, Peter G. R. Smith, E. K. Campbell, +8

Gsm TransceiverElectrical EngineeringEngineeringRadio FrequencyHigh-frequency Device +7

Electron cyclotron resonance plasma reactor for cryogenic etching

Eray S. Aydil, J. Greguš, Richard A. Gottscho

Review of Scientific Instruments

Electrical EngineeringPlasma UniformityEngineeringPlasma ElectronicsApplied Physics +10

Real-time, <i>in</i> <i>situ</i> monitoring of surface reactions during plasma passivation of GaAs

Eray S. Aydil, Zhen Zhou, Konstantinos P. Giapis, +3

Applied Physics Letters

Optical MaterialsRemote Plasma PassivationEngineeringOptoelectronic DevicesChemistry +19

Effect of Post-Deposition Annealing Treatment on the Structural, Optical and Gas Sensing Properties of TiO&lt;sub&gt;2&lt;/sub&gt; Thin Films

Azhar Ali Haidry, Pavol Ďurina, M. Tomášek, +9

Key engineering materials

Optical MaterialsEngineeringGas SensorTio 2Thin Film Process Technology +14

Preparation of MgB2 superconducting thin films by magnetron sputtering

R. Mičunek, A. Plecenı́k, P. Kúš, +10

Physica C Superconductivity

Materials EngineeringMagnetismMaterials ScienceSuperconducting MaterialEngineering +5

Superconducting MoC thin films with enhanced sheet resistance

M. Trgala, Martin Žemlička, P. Neilinger, +8

Applied Surface Science

Materials ScienceMoc Thin FilmsSuperconducting MaterialEngineeringApplied Physics +2