25
Publications
982
Citations
18
H-Index
1977
Active since
Andrew D. Bailey is an author at University of Illinois Urbana-Champaign specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsPhysicsBusinessInstrumentationPlasma PhysicsMicroelectronicsPlasma ScienceSurface ScienceComputer Science
Publications per year
1977–2022
25
25
Web-based e-catalog systems in B2B procurement
John P. Baron, Michael J. Shaw, Andrew D. Bailey · Communications of the ACM · 2000 · 144 citations · Full text
Scaling of Si and GaAs trench etch rates with aspect ratio, feature width, and substrate temperature
Andrew D. Bailey, M. C. M. van de Sanden, J. Greguš et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 61 citations · Full text
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