Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors - Concepedia

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Incidence angle distributions of ions bombarding grounded surfaces in high density plasma reactors

30

Citations

26

References

1998

Year

Eray S. Aydil, B. Quiniou, J.T.C Lee, J. Greguš, Richard A. Gottscho

Materials Science in Semiconductor Processing

EngineeringPhysicsSurface ScienceApplied PhysicsPlasma SciencePlasma PhysicsIncidence Angle DistributionsIon BeamGas Discharge PlasmaIon EmissionPlasma Application

References

	Year	Citations

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