Concepedia

Roy Yu

RY

6

Publications

124

Citations

6

H-Index

2006

Active since

Affiliations

IBM (United States)(Current)

ASM Pacific Technology (China)

IBM Research - Thomas J. Watson Research Center

Roy Yu is an author at IBM (United States) specializing in applied physics, microfabrication, and engineering.

Top concepts

EngineeringApplied PhysicsMicrofabricationMicrostructureNanolithographyOptoelectronicsMaterial ScienceMicroelectronicsComputer EngineeringElectronic Packaging

Publications per year

2006–2023

6

Publications

6

3D stacking of high-performance processors

Philip Emma, Alper Buyuktosunoglu, Michael B. Healy et al. · 2014 · 33 citations

Nanopatterned Bulk Metallic Glass Biosensors

Emily Kinser, Jagannath Padmanabhan, Roy Yu et al. · ACS Sensors · 2017 · 33 citations

Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes

S.E. Steen, Sharee J. McNab, L. Šekarić et al. · Microelectronic Engineering · 2006 · 17 citations

Wafer Scale Processing, Engineering, Electron-beam Lithography +11

Surface Energy Characterization for Die-Level Cu Hybrid Bonding

Katsuyuki Sakuma, Roy Yu, Michael Belyansky et al. · 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) · 2022 · 14 citations

Voids-free Die-level Cu/ILD Hybrid bonding

Katsuyuki Sakuma, Roy Yu, Nicholas A. Polomoff et al. · 2023 · 14 citations

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