Statistics
Publications
6
Citations
149
H-Index
6
Active since
2005
Affiliations
Kaidong Xu is an author at IMEC specializing in materials engineering, engineering, and materials science.
Publications per year
2005–2024
6
6
Challenges with Respect to High-k/Metal Gate Stack Etching and Cleaning
Rita Vos, Sophia Arnauts, Inge Bovie et al. · ECS Transactions · 2007 · 14 citations
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