Hiroya Ohta - Concepedia

Author

Hiroya Ohta

Also Known As

Hiroya Ohta

Publications

122

Citations

H-Index

Concepts

All Affiliations

Hiroya Ohta is an author at Hitachi (Japan) specializing in engineering, applied physics, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	51
2	Applied Physics	3	3	40
3	Health Sciences	1	1	11
4	Natural Sciences	1	1	16
5	Computer Engineering	1	1	16

Hiroya Ohta

Publications

Citations

H-Index

Page 1

	Year	Citations
High-voltage CD-SEM-based application to monitor 3D profile of high-aspect-ratio features Wei Sun, Hiroya Ohta, Taku Ninomiya, Journal of Micro/Nanolithography MEMS and MOEMS EngineeringElectron-beam LithographyMicroscopyIn-line Metrology3D Modeling	2020	16
Accurate critical dimension control by using an azide/novolak resist process for electron-beam lithography Jiro Yamamoto, Shou-ichi Uchino, Hiroya Ohta, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyNanodevicesTarget FabricationWafer Scale Processing	1997	12
Optical system for a multiple-beam scanning electron microscope Momoyo Enyama, Makoto Sakakibara, Sayaka Tanimoto, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringMicroscopyElectron OpticBeam OpticElectron Microscopy	2014	12
Preparatory Study for the Matrix-Pattern Imaging, EB System Sayaka Tanimoto, Yasuhiro Someda, M. Okumura, Japanese Journal of Applied Physics EngineeringElectron-beam LithographyMicroscopyPreparatory StudyElectron Optic	2003	11

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