Concepedia

Author

M. Okumura

Hitachi (Japan)

Also Known As

M. Okumura, Masahide Okumura

14

Publications

75

Citations

4

H-Index

20

Concepts

All Affiliations

Hitachi (Japan)
MO

About

M. Okumura is an author at Hitachi (Japan) specializing in instrumentation, microscopy, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

51

2

Electrical Engineering

2

2

51

3

Health Sciences

1

1

11

4

Applied Physics

1

1

40

5

Computer Engineering

1

1

40

M. Okumura

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2

Publications

51

Citations

2

H-Index

YearCitations

Electron-beam cell-projection lithography system

Y. Sakitani, Haruo Yoda, Hideo Todokoro,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1992

40

Preparatory Study for the Matrix-Pattern Imaging, EB System

Sayaka Tanimoto, Yasuhiro Someda, M. Okumura,

Japanese Journal of Applied Physics

2003

11

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