Concepedia

M. Okumura

MO

Statistics

Publications

2

Citations

51

H-Index

2

Active since

1992

Affiliations

Hitachi (Japan)(Current)

M. Okumura is an author at Hitachi (Japan) specializing in instrumentation, microscopy, and engineering.

Top concepts

MicroscopyEngineeringInstrumentationElectrical EngineeringHealthImagingRadiologyVlsi DesignApplied PhysicsMedical Imaging

Publications per year

1992–2003

2

Publications

2

Electron-beam cell-projection lithography system

Y. Sakitani, Haruo Yoda, Hideo Todokoro et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 40 citations

Engineering, Vlsi Design, Electron-beam Lithography +19

Preparatory Study for the Matrix-Pattern Imaging, EB System

Sayaka Tanimoto, Yasuhiro Someda, M. Okumura et al. · Japanese Journal of Applied Physics · 2003 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +17

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