Concepedia

Mahmoud Khojasteh

MK

Statistics

Publications

6

Citations

179

H-Index

6

Active since

1994

Affiliations

IBM (United States)(Current)

Mahmoud Khojasteh is an author at IBM (United States) specializing in materials science, natural sciences, and materials engineering.

Publications per year

1994–2013

6

Publications

6

Organocatalyst trityl chloride efficiently promoted the solvent-free synthesis of 12-aryl-8,9,10,12-tetrahydrobenzo[a]-xanthen-11-ones by in situ formation of carbocationic system in neutral media

Ardeshir Khazaei, Mohammad Ali Zolfigol, Ahmad Reza Moosavi‐Zare et al. · Catalysis Communications · 2012 · 98 citations

Natural Sciences, Chemistry, Catalysis +9

Post Cu CMP Cleaning of Polyurethane Pad Debris

Wei‐Tsu Tseng, Elliott Rill, Benjamin Backes et al. · ECS Journal of Solid State Science and Technology · 2013 · 20 citations

Engineering, Materials Engineering, Materials Science +11

Reactive ion etching of fluorine containing photoresist

Kaushal Patel, Victor Pham, Wenjie Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +16

Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology

Wei‐Tsu Tseng, Vamsi Devarapalli, James Steffes et al. · IEEE Transactions on Semiconductor Manufacturing · 2013 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +17

Evaluation of a new environmentally stable positive tone chemically amplified deep-UV resist

Wu‐Song Huang, Ranee W. Kwong, Ahmad D. Katnani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 14 citations

Natural Sciences, Materials Science, Contrast Sensitivity +7

1–5 of 6