Concepedia

Author

Mahmoud Khojasteh

IBM (United States)

Also Known As

Mahmoud Khojasteh, Mahmoud M. Khojasteh

24

Publications

268

Citations

7

H-Index

31

Concepts

All Affiliations

IBM (United States)
MK

About

Mahmoud Khojasteh is an author at IBM (United States) specializing in engineering, chemical engineering, and chemistry.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

160

2

Chemical Engineering

4

4

142

3

Chemistry

4

4

141

4

Applied Physics

3

3

43

5

Natural Sciences

1

1

11

Mahmoud Khojasteh

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6

Publications

177

Citations

6

H-Index

YearCitations

Organocatalyst trityl chloride efficiently promoted the solvent-free synthesis of 12-aryl-8,9,10,12-tetrahydrobenzo[a]-xanthen-11-ones by in situ formation of carbocationic system in neutral media

Ardeshir Khazaei, Mohammad Ali Zolfigol, Ahmad Reza Moosavi‐Zare,

Catalysis Communications

2012

98

Post Cu CMP Cleaning of Polyurethane Pad Debris

Wei‐Tsu Tseng, Elliott Rill, Benjamin Backes,

ECS Journal of Solid State Science and Technology

2013

19

Reactive ion etching of fluorine containing photoresist

Kaushal Patel, Victor Pham, Wenjie Li,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2006

18

Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology

Wei‐Tsu Tseng, Vamsi Devarapalli, James Steffes,

IEEE Transactions on Semiconductor Manufacturing

2013

17

Evaluation of a new environmentally stable positive tone chemically amplified deep-UV resist

Wu‐Song Huang, Ranee W. Kwong, Ahmad D. Katnani,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1994

14

193nm single layer photoresists: defeating tradeoffs with a new class of fluoropolymers

Pushkara R. Varanasi, Ranee W. Kwong, Mahmoud Khojasteh,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2005

11

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