Statistics
Publications
4
Citations
87
H-Index
4
Active since
2003
Affiliations
Cornell University(Current)
Victor Pham is an author at Cornell University specializing in engineering, materials science, and chemistry.
Publications per year
2003–2006
4
4
Silicon containing polymer in applications for 193 nm high NA lithography processes
Sean Burns, Dirk Pfeiffer, Arpan P. Mahorowala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations
Optical Materials, Engineering, Electron-beam Lithography +17
1–4 of 4