Statistics
Publications
10
Citations
194
H-Index
10
Active since
2000
Affiliations
Kaushal Patel is an author at Sardar Patel University specializing in materials science, materials engineering, and natural sciences.
Publications per year
2000–2015
10
10
Silicon containing polymer in applications for 193 nm high NA lithography processes
Sean Burns, Dirk Pfeiffer, Arpan P. Mahorowala et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +17
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