Elliott Rill - Concepedia

Author

Elliott Rill

Also Known As

E. Rill, Elliott Rill

Publications

1.4K

Citations

H-Index

Concepts

All Affiliations

Elliott Rill is an author at IBM (United States) specializing in environmental remediation, wastewater treatment, and chemical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	19
2	Chemical Engineering	1	1	19
3	Materials Science	1	1	19
4	Environmental Remediation	1	1	19
5	Recycling	1	1	19

Elliott Rill

Publications

1.3K

Citations

H-Index

Page 1

	Year	Citations
A Physically Transient Form of Silicon Electronics Suk‐Won Hwang, Hu Tao, Dae‐Hyeong Kim, Science	2012	1.2K
Post Cu CMP Cleaning of Polyurethane Pad Debris Wei‐Tsu Tseng, Elliott Rill, Benjamin Backes, ECS Journal of Solid State Science and Technology Materials ScienceHazardous WasteChemical EngineeringEngineeringPlastic Recycling	2013	19
Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology Wei‐Tsu Tseng, Vamsi Devarapalli, James Steffes, IEEE Transactions on Semiconductor Manufacturing	2013	17

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