Mariko Takayanagi

Experimental Evidence of Inversion-Layer Mobility Lowering in Ultrathin Gate Oxide Metal-Oxide-Semiconductor Field-Effect-Transistors with Direct Tunneling Current

Shinichi Takagi, Mariko Takayanagi · Japanese Journal of Applied Physics · 2002 · 80 citations

Engineering, Electrical Engineering, Materials Science +17

Comprehensive Understanding of Electron and Hole Mobility Limited by Surface Roughness Scattering in Pure Oxides and Oxynitrides Based on Correlation Function of Surface Roughness

Takamitsu Ishihara, Kazuya Matsuzawa, Mariko Takayanagi et al. · Japanese Journal of Applied Physics · 2002 · 29 citations

Engineering, Electrical Engineering, Materials Science +13

Extendibility of NiPt Silicide Contacts for CMOS Technology Demonstrated to the 22-nm Node

K. Ohuchi, C. Lavoie, Conal E. Murray et al. · 2007 · 19 citations

Engineering, Electrical Engineering, Materials Science +14

High-K Gate Dielectric Structures by Atomic Layer Deposition for the 32nm and Beyond Nodes

Robert D. Clark, Steven Consiglio, Cory S. Wajda et al. · ECS Transactions · 2008 · 17 citations

Engineering, Electrical Engineering, Materials Engineering +17

Carrier transport properties of thin gate oxides after soft and hard breakdown

Shinichi Takagi, Mariko Takayanagi · Microelectronic Engineering · 2001 · 13 citations

Engineering, Electrical Engineering, Materials Science +16