Shao-Feng Ding - Concepedia

Author

Shao-Feng Ding

Also Known As

Shao-Feng Ding

Publications

131

Citations

H-Index

Concepts

All Affiliations

Shao-Feng Ding is an author at State Key Laboratory of ASIC and System specializing in surface science, materials science, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	100
2	Applied Physics	2	2	46
3	Chemistry	2	2	46
4	Chemical Engineering	1	1	54
5	Materials Engineering	1	1	28

Shao-Feng Ding

Publications

100

Citations

H-Index

Page 1

	Year	Citations
ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems Thomas Waechtler, Shao-Feng Ding, Lutz Hofmann, Microelectronic Engineering Materials ScienceChemical EngineeringEngineeringSurface ElectrochemistryElectrochemical Copper Deposition	2010	54
Cu adhesion on tantalum and ruthenium surface: Density functional theory study Shao-Feng Ding, Shaoren Deng, Hai‐Sheng Lu, Journal of Applied Physics Materials ScienceMaterials EngineeringCu AdhesionSurface CharacterizationCopper Adhesion	2010	28
TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition Qi Xie, Davy Deduytsche, Jan Musschoot, Microelectronic Engineering Materials ScienceEngineeringNanotechnologySurface ScienceApplied Physics	2010	18

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