Concepedia

Shao-Feng Ding

SD

3

Publications

100

Citations

3

H-Index

2010

Active since

Affiliations

State Key Laboratory of ASIC and System(Current)

Fudan University

Ghent University

Shao-Feng Ding is an author at State Key Laboratory of ASIC and System specializing in surface science, materials science, and engineering.

Top concepts

Publications per year

2010–2010

3

Publications

3

ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems

Thomas Waechtler, Shao-Feng Ding, Lutz Hofmann et al. · Microelectronic Engineering · 2010 · 54 citations

, , +8

Cu adhesion on tantalum and ruthenium surface: Density functional theory study

Shao-Feng Ding, Shaoren Deng, Hai‐Sheng Lu et al. · Journal of Applied Physics · 2010 · 28 citations

, , +13

TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition

Qi Xie, Davy Deduytsche, Jan Musschoot et al. · Microelectronic Engineering · 2010 · 18 citations

, , +10

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