Concepedia

Lutz Hofmann

LH

5

Publications

152

Citations

5

H-Index

1994

Active since

Affiliations

Fraunhofer Institute for Electronic Nano Systems(Current)

Chemnitz University of Technology

Lutz Hofmann is an author at Fraunhofer Institute for Electronic Nano Systems specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsPhotonicsThin Films3D Printing3D IntegrationOptoelectronicsSurface ScienceElectrochemistry

Publications per year

1994–2023

5

Publications

5

Investigations regarding Through Silicon Via filling for 3D integration by Periodic Pulse Reverse plating with and without additives

Lutz Hofmann, Ramona Ecke, Stefan E. Schulz · Microelectronic Engineering · 2010 · 57 citations

Materials Science, Photonics, Silicon Via Filling +9

ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems

Thomas Waechtler, Shao-Feng Ding, Lutz Hofmann et al. · Microelectronic Engineering · 2010 · 54 citations

Materials Science, Chemical Engineering, Engineering +8

Process and Design Challenges for Hybrid Bonding

Vikas Dubey, Dirk Wünsch, Knut Gottfried et al. · ECS Transactions · 2023 · 16 citations · Full text

Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding

Vikas Dubey, Dirk Wünsch, Knut Gottfried et al. · 2023 · 14 citations

Normal-state hall effect and resistivity measurements of YBa2Cu3O x -films with different oxygen content

Lutz Hofmann, H. Karl, K. Samwer · The European Physical Journal B · 1994 · 11 citations

Materials Science, Different Oxygen Content, Engineering +10

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