Publication | Closed Access
ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems
54
Citations
20
References
2010
Year
Materials ScienceChemical EngineeringEngineeringSurface ElectrochemistryElectrochemical Copper DepositionSurface ScienceChemical DepositionAld-grown Seed LayersElectrochemical ProcessElectrochemical InterfaceElectrochemistry
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