12
Publications
660
Citations
11
H-Index
2007
Active since
Thomas Waechtler is an author at Chemnitz University of Technology specializing in engineering, materials science, and chemistry.
Top concepts
EngineeringMaterial ScienceChemistryInorganic ChemistrySurface ScienceApplied PhysicsChemical EngineeringMaterials EngineeringThin FilmsCatalysis
Publications per year
2007–2015
12
12
New precursors for CVD copper metallization
John A. T. Norman, Melanie Perez, Stefan E. Schulz et al. · Microelectronic Engineering · 2008 · 38 citations
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