Concepedia

Yaichiro Watakabe

YW

Statistics

Publications

8

Citations

155

H-Index

8

Active since

1981

Affiliations

Mitsubishi Electric (Japan)(Current)

Yaichiro Watakabe is an author at Mitsubishi Electric (Japan) specializing in materials science, materials engineering, and engineering.

Publications per year

1981–1994

8

Publications

8

Focused ion beam lithography and its application to submicron devices

Hiroaki Morimoto, Yōichi Sasaki, Kazunori Saitoh et al. · Microelectronic Engineering · 1986 · 40 citations

, , +10

Characteristics of submicron patterns fabricated by gallium focused-ion-beam sputtering

Hiroaki Morimoto, Y. Sasaki, Yaichiro Watakabe et al. · Journal of Applied Physics · 1985 · 27 citations

, , +15

Practical results of photomask repair using focused ion beam technology

Kenji Saitoh, Hiroshi Onoda, Hiroaki Morimoto et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 20 citations

, , +12

Sputtered W-Ti Film for X-Ray Mask Absorber

Hideki Yabe, Kenji Marumoto, Sunao Aya et al. · Japanese Journal of Applied Physics · 1992 · 19 citations

, , +16

Fabrication of surface acoustic wave devices by using x-ray lithography

Nobuyuki Yoshioka, Atsushi Sakai, Hiroaki Morimoto et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 13 citations

, , +13

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