Concepedia

Kenji Saitoh

KS

Statistics

Publications

2

Citations

39

H-Index

2

Active since

1988

Affiliations

Mitsubishi Electric (Japan)(Current)

Kenji Saitoh is an author at Mitsubishi Electric (Japan) specializing in engineering, imaging resolution, and light distribution.

Publications per year

1988–1999

2

Publications

2

Practical results of photomask repair using focused ion beam technology

Kenji Saitoh, Hiroshi Onoda, Hiroaki Morimoto et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 20 citations

Engineering, Materials Engineering, Materials Science +12

Multilevel imaging system realizing k1=0.3 lithography

Akiyoshi Suzuki, Kenji Saitoh, Minoru Yoshii · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 19 citations

Engineering, Electrical Engineering, Optics +10

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