Carsten Hartig

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16

In-line E-beam wafer metrology and defect inspection: the end of an era for image-based critical dimensional metrology? New life for defect inspection

Eric Solecky, Oliver D. Patterson, Andrew Stamper et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 28 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

INDIRECTLY PRIMED CD8+ T CELLS ARE A PROMINENT COMPONENT OF THE ALLOGENEIC T-CELL REPERTOIRE AFTER SKIN GRAFT REJECTION IN MICE1

Anna Valujskikh, Carsten Hartig, Peter S. Heeger · Transplantation · 2001 · 24 citations

Life Sciences, Immunology, Pathology +14

Naturally Developing Memory T Cell Xenoreactivity to Swine Antigens in Human Peripheral Blood Lymphocytes

Carsten Hartig, Gary W. Haller, David H. Sachs et al. · The Journal of Immunology · 2000 · 23 citations

Life Sciences, Immunology, Adaptive Immunity +16

Hybrid metrology solution for 1X node technology

Alok Vaid, Alexander Elia, Mark Kelling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations

Engineering, Electrical Engineering, Metrology +16