C. Bowen

Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing

P.R. Chidambaram, C. Bowen, S. Chakravarthi et al. · IEEE Transactions on Electron Devices · 2006 · 193 citations

Engineering, Electrical Engineering, Materials Engineering +17

Physical oxide thickness extraction and verification using quantum mechanical simulation

C. Bowen, Chenjing L. Fernando, Gerhard Klimeck et al. · 2002 · 56 citations

Engineering, Electrical Engineering, Materials Science +17

Sub-100 nm gate length metal gate NMOS transistors fabricated by a replacement gate process

Amitava Chatterjee, R. A. Chapman, G. Dixit et al. · 2002 · 56 citations

Engineering, Electrical Engineering, Materials Science +17

An enhanced 90nm high performance technology with strong performance improvements from stress and mobility increase through simple process changes

R. Khamankar, H. Bu, C. Bowen et al. · 2004 · 21 citations

Engineering, Electrical Engineering, Microelectronics +14

The roles of hydrogen and holes in trap generation and breakdown in ultra-thin SiON dielectrics

Paul E. Nicollian, A.T. Krishnan, C. Bowen et al. · 2006 · 19 citations

Engineering, Electrical Engineering, Materials Science +14