Wen-Fa Wu

Effective repair to ultra-low-<i>k</i> dielectric material (<i>k</i>∼2.0) by hexamethyldisilazane treatment

Y. S. Mor, Ting‐Chang Chang, Po‐Tsun Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 81 citations

Materials Engineering, Materials Science, Chemical Engineering +13

The effects of plasma treatment for low dielectric constant hydrogen silsesquioxane (HSQ)

Po‐Tsun Liu, Ting‐Chang Chang, Simon M. Sze et al. · Thin Solid Films · 1998 · 80 citations

Chemical Engineering, Engineering, Hydrogen +2

Stacked Ge-Nanosheet GAAFETs Fabricated by Ge/Si Multilayer Epitaxy

Chun-Lin Chu, Kehuey Wu, Guang-Li Luo et al. · IEEE Electron Device Letters · 2018 · 80 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +12

First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3-D Integration With Dual Work Function Gate for Ultralow-Power SRAM and RF Applications

Shu-Wei Chang, Tsung-Han Lu, Cong-Yi Yang et al. · IEEE Transactions on Electron Devices · 2022 · 45 citations

Engineering, Vlsi Design, Integrated Circuits +20

A novel junctionless FinFET structure with sub-5nm shell doping profile by molecular monolayer doping and microwave annealing

Y.-J. Lee, T.-C. Cho, Kuo-Hsing Kao et al. · 2014 · 41 citations

Semiconductor Technology, Electrical Engineering, Engineering +11