Concepedia

Publication | Closed Access

The effects of plasma treatment for low dielectric constant hydrogen silsesquioxane (HSQ)

DOI

80

Citations

1

References

1998

Year

Po‐Tsun Liu, Ting‐Chang Chang, Simon M. Sze, Fu‐Ming Pan, Y.J Mei, Wen-Fa Wu, Mu-Sen Tsai, B. T. Dai, Chun‐Yen Chang, Fu-Yung Shih,
Thin Solid Films

References

YearCitations

Page 1