Deepika Priyadarshini

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

A. Grill, S. M. Gates, Todd E. Ryan et al. · Applied Physics Reviews · 2014 · 283 citations · Full text

Engineering, Device Integration, Advanced Low K +19

Tungsten and cobalt metallization: A material study for MOL local interconnects

V. Kamineni, M. Raymond, S. Siddiqui et al. · 2016 · 63 citations

Mol Local Interconnects, Engineering, Cvd W-based Metallization +21

High-Throughput Characterization of Surface Segregation in Cu_<i>x</i>Pd_1–<i>x</i> Alloys

Deepika Priyadarshini, Petro Kondratyuk, Yoosuf N. Picard et al. · The Journal of Physical Chemistry C · 2011 · 50 citations

Fabrication of Microchannels in Ceramics (Quartz) Using Electrochemical Spark Micromachining (ECSMM)

V.K. Jain, Deepika Priyadarshini · Journal of Advanced Manufacturing Systems · 2014 · 38 citations

Engineering, Mechanical Engineering, Micromanufacturing +20

BEOL process integration for the 7 nm technology node

T. Standaert, Genevieve Beique, H.-C. Chen et al. · 2016 · 35 citations

Engineering, Electron-beam Lithography, Device Integration +17