R. v. Criegern

Analysis of polycrystalline silicon diffusion sources by secondary ion mass spectrometry

H. Schaber, R. v. Criegern, I. Weitzel · Journal of Applied Physics · 1985 · 76 citations

Engineering, Chemistry, Silicon On Insulator +17

Verification of models for the simulation of boron implantation into crystalline silicon

G. Hobler, A. Simionescu, L. Palmetshofer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 13 citations

Engineering, Material Simulation, Integrated Circuits +19

A novel high performance adhesion enhancing Zn-Cr leadframe coating for popcorn prevention

C. Lee, W. Hoesler, H. Cerva et al. · IEEE Transactions on Advanced Packaging · 1999 · 13 citations

Engineering, Mechanical Engineering, Adhesion Enhancing +16

Method for the measurement of the lateral dose distribution of dopants at implantation or diffusion mask edges (‘‘lateral SIMS’’)

R. v. Criegern, F. Jahnel, Marco Bianco et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 11 citations

Engineering, Microscopy, Mask Edge +19

Optimization of the dynamic range of SIMS depth profiles by sample preparation

R. v. Criegern, L. Weitzel, H. Zeininger et al. · Surface and Interface Analysis · 1990 · 11 citations

Ion Implantation, Engineering, Accelerator Mass Spectrometry +15