Simone Giangrandi

Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

Simone Giangrandi, Timo Sajavaara, Bert Brijs et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2008 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +10

A Comparison of Spike, Flash, SPER and Laser Annealing for 45nm CMOS

Richard Lindsay, B. J. Pawlak, J. A. Kittl et al. · MRS Proceedings · 2003 · 42 citations

Engineering, Computer Engineering, Electrical Engineering +12

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

Richard Lindsay, K. Henson, W. Vandervorst et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 31 citations

Engineering, Electrical Engineering, Materials Science +17

A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

Y. TravaIy, Jörg Schuhmacher, Mikhaı̈l R. Baklanov et al. · Journal of Applied Physics · 2005 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +17

Depth resolution optimization for low-energy ERDA

Simone Giangrandi, Kai Arstila, Bert Brijs et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2007 · 11 citations

Computing, Earth Sciences, Digital Imaging +7