B. J. Pawlak

Effect of amorphization and carbon co-doping on activation and diffusion of boron in silicon

B. J. Pawlak, T. Janssens, Bert Brijs et al. · Applied Physics Letters · 2006 · 64 citations

Engineering, Materials Engineering, Materials Science +17

Suppression of phosphorus diffusion by carbon co-implantation

B. J. Pawlak, Ray Duffy, T. Janssens et al. · Applied Physics Letters · 2006 · 57 citations

Engineering, Materials Engineering, Materials Science +17

A Comparison of Spike, Flash, SPER and Laser Annealing for 45nm CMOS

Richard Lindsay, B. J. Pawlak, J. A. Kittl et al. · MRS Proceedings · 2003 · 42 citations

Engineering, Computer Engineering, Electrical Engineering +12

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

Richard Lindsay, K. Henson, W. Vandervorst et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 31 citations

Engineering, Electrical Engineering, Materials Science +17

Optimisation of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm CMOS

Richard Lindsay, B. J. Pawlak, P.A. Stolk et al. · MRS Proceedings · 2002 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +14