Statistics
Publications
5
Citations
113
H-Index
5
Active since
2002
Affiliations
IBM (United States)(Current)
S. C. Song is an author at IBM (United States) specializing in semiconductor devices, electrical engineering, and engineering.
Publications per year
2002–2007
5
5
Comparison of Plasma-Induced Damage in SIO2/TIN and HFO2/TIN Gate Stacks
Chadwin D. Young, G. Bersuker, Feng Zhu et al. · 2007 · 23 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Impact of plasma induced damage on PMOSFETs Tin/HF silicate stack
S. C. Song, S.H. Bae, Z. Zhang et al. · 2005 · 12 citations
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