In-Yong Kang - Concepedia

Author

In-Yong Kang

Also Known As

In-Yong Kang, Inyong Kang

Publications

101

Citations

H-Index

Concepts

All Affiliations

In-Yong Kang is an author at Samsung (South Korea) specializing in microfabrication, electronic packaging, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	42
2	Computer Engineering	1	1	15
3	Electrical Engineering	1	1	15
4	Materials Science	1	1	13
5	Mechanical Engineering	1	1	13

In-Yong Kang

Publications

Citations

H-Index

Page 1

	Year	Citations
The analysis of EUV mask defects using a wafer defect inspection system Kyoungyong Cho, Joo-On Park, Chang-Min Park, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringWafer Scale ProcessingEngineeringElectron-beam LithographyBeam Lithography	2010	15
Characterization of Ru layer for capping/buffer application in EUVL mask Tae Geun Kim, Seung Yoon Lee, Chung Yong Kim, Microelectronic Engineering Ru Layer	2006	15
A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection Sungmin Huh, Liping Ren, David Y. Chan, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Wafer Scale ProcessingExtreme Ultraviolet LithographyMask InspectionEngineeringMicrofabrication	2010	14
Printability and inspectability of programmed pit defects on the masks in EUV lithography In-Yong Kang, Hwan-Seok Seo, Byung-Sup Ahn, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyEuv LithographyMechanical EngineeringWafer Scale Processing	2010	13

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