Concepedia

Publication | Closed Access

Characterization of Ru layer for capping/buffer application in EUVL mask

DOI

15

Citations

6

References

2006

Year

Tae Geun Kim, Seung Yoon Lee, Chung Yong Kim, In‐Sung Park, In-Yong Kang, Nae‐Eung Lee, Yong‐Chae Chung, Jinho Ahn
Microelectronic Engineering

References

YearCitations

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