Liping Ren - Concepedia

Author

Liping Ren

Also Known As

L. Ren, Liping Ren, Liyan Ren, Lufan Ren

Publications

Citations

H-Index

Concepts

All Affiliations

Liping Ren is an author at Samsung (South Korea) specializing in electronic packaging, engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	47
2	Applied Physics	2	2	33
3	Electrical Engineering	2	2	33
4	Materials Engineering	1	1	18
5	Materials Science	1	1	18

Liping Ren

Publications

Citations

H-Index

Page 1

	Year	Citations
Line width roughness control and pattern collapse solutions for EUV patterning Karen Petrillo, George Huang, Dominic Ashworth, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2011	19
Characterization of promising resist platforms for sub-30-nm HP manufacturability and EUV CAR extendibility study Chawon Koh, Jacque H. Georger, Liping Ren, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyResist CollapseResistorBeam Lithography	2010	18
Assessment of EUV resist readiness for 32-nm hp manufacturing and extendibility study of EUV ADT using state-of-the-art resist Chawon Koh, Liping Ren, Jacque H. Georger, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Short Wavelength OpticEngineeringElectron-beam LithographyNm Hp PatterningIntegrated Circuits	2009	15
A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection Sungmin Huh, Liping Ren, David Y. Chan, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Wafer Scale ProcessingExtreme Ultraviolet LithographyMask InspectionEngineeringMicrofabrication	2010	14

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