Sungmin Huh

Improving the performance of the actinic inspection tool with an optimized alignment procedure

Iacopo Mochi, Kenneth A. Goldberg, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 17 citations

Natural Sciences, Biomedical Engineering, Machine Vision +14

Benchmarking EUV mask inspection beyond 0.25 NA

Kenneth A. Goldberg, Iacopo Mochi, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations · Full text

Medicine, Mechatronics Engineering, Contrast Sensitivity +14

A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection

Sungmin Huh, Liping Ren, David Y. Chan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +15

Printability and inspectability of programmed pit defects on the masks in EUV lithography

In-Yong Kang, Hwan-Seok Seo, Byung-Sup Ahn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations

Engineering, Materials Engineering, Materials Science +17

Study of real defects on EUV blanks and a strategy for EUV mask inspection

Sungmin Huh, Abbas Rastegar, Stefan Wurm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +17