Concepedia

Stefan Wurm

SW

23

Publications

560

Citations

15

H-Index

1988

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

Samsung (South Korea)

Intel (United States)

Technical University of Munich

Advanced Micro Devices (United States)

Stefan Wurm is an author at Lawrence Berkeley National Laboratory specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicrofabricationMicroelectronicsTechnologyElectronic Packaging3D PrintingMaterial ScienceInstrumentationOptoelectronics

Publications per year

1988–2015

23

Publications

23

ITRS lithography roadmap: 2015 challenges

Mark Neisser, Stefan Wurm · Advanced Optical Technologies · 2015 · 117 citations

Quadruple Patterning, Engineering, Electron-beam Lithography +19

Extreme Ultraviolet Lithography Development in the United States

Stefan Wurm · Japanese Journal of Applied Physics · 2007 · 53 citations

Electrical Engineering, Projection Optics Lifetime, Engineering +15

Modulated optical reflectance measurements on amorphous silicon layers and detection of residual defects

Stefan Wurm, P. Alpern, D. Savignac et al. · Applied Physics A · 1988 · 35 citations

Photonics, Amorphous Silicon Layers, Optical Materials +12

EUV Lithography Development and Research Challenges for the 22 nm Half-pitch

Stefan Wurm · Journal of Photopolymer Science and Technology · 2009 · 32 citations · Full text

Engineering, Electron-beam Lithography, Nm Half-pitch +17

22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool

Patrick Naulleau, Christopher N. Anderson, Jerrin Chiu et al. · Microelectronic Engineering · 2009 · 31 citations

Ultraviolet Light, Photonics, Engineering +11

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