Concepedia

Publication | Closed Access

22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool

DOI

31

Citations

11

References

2009

Year

Patrick Naulleau, Christopher N. Anderson, Jerrin Chiu, Paul Denham, Simi George, Kenneth A. Goldberg, Michael Goldstein, Brian Hoef, Russ Hudyma, Gideon Jones,
Microelectronic Engineering

References

YearCitations

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