David Y. Chan

Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate

Jhy-Ming Tsao, Shih-Cheng Hu, Tengfang Xu et al. · Energy and Buildings · 2010 · 40 citations

Engineering, Energy Efficiency, Air Quality +17

Characterization of energy use in 300 mm DRAM (Dynamic Random Access Memory) wafer fabrication plants (fabs) in Taiwan

Shih-Cheng Hu, Tengfang Xu, Tony Chaung et al. · Energy · 2010 · 17 citations

Non-volatile Memory, Electrical Engineering, Mm Dram +9

A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection

Sungmin Huh, Liping Ren, David Y. Chan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Wafer Scale Processing, Extreme Ultraviolet Lithography, Mask Inspection +10

100-nm node lithography with KrF?

M. Fritze, Brian Tyrrell, David K. Astolfi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

High Resolution, Engineering, Electron-beam Lithography +25

Gratings of regular arrays and trim exposures for ultralarge scale integrated circuit phase-shift lithography

M. Fritze, Brian Tyrrell, David K. Astolfi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +20