U. Smith

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

F. Engelmark, G. Fucntes, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 92 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +16

Morphological and phase stability of nickel–germanosilicide on Si1−xGex under thermal stress

Tobias Jarmar, J. Seger, Fredric Ericson et al. · Journal of Applied Physics · 2002 · 85 citations

Materials Science, Materials Engineering, Thermal Stress +15

Self-aligned silicides for Ohmic contacts in complementary metal–oxide–semiconductor technology: TiSi2, CoSi2, and NiSi

S.-L. Zhang, U. Smith · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 85 citations

Engineering, Self-aligned Silicides, Semiconductor Device +17

A transmission electron microscopy study of hillocks in thin aluminum films

Fredric Ericson, Nils Kristensen, Jan‐Åke Schweitz et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 81 citations

Materials Science, Aluminium Nitride, Surface Characterization +14

Differential scanning calorimetry analysis of the linear parabolic growth of nanometric Ni silicide thin films on a Si substrate

F. Nemouchi, D. Mangelinck, C. Bergman et al. · Applied Physics Letters · 2005 · 73 citations

Si Substrate, Engineering, Crystal Growth Technology +18