Concepedia

Author

Michael A. Fury

Philips (United States)

Also Known As

M FURY, M. A. Fury, M. Fury, M.A. Fury, Michael A. Fury

22

Publications

298

Citations

7

H-Index

27

Concepts

All Affiliations

Philips (United States)Albany State UniversityUniversity at Albany, State University of New York
MA

About

Michael A. Fury is an author at Philips (United States) specializing in engineering, materials science, and materials engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

281

2

Materials Engineering

5

5

167

3

Applied Physics

2

2

107

4

Chemical Engineering

2

2

70

5

Electrical Engineering

1

1

29

Michael A. Fury

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7

Publications

281

Citations

7

H-Index

YearCitations

The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics

Fan Zhang, Ahmed Busnaina, Michael A. Fury,

Journal of Electronic Materials

2000

78

Chemical Vapor Deposition of Copper for Multilevel Metallization

Alain E. Kaloyeros, Michael A. Fury

MRS Bulletin

1993

58

Polishing Parameter Dependencies and Surface Oxidation of Chemical Mechanical Polishing of Al Thin Films

P. Wrschka, J. M. Hernandez, Y. Y. Hsu,

Journal of The Electrochemical Society

1999

42

Chemical mechanical polishing of polymer films

Dan Towery, Michael A. Fury

Journal of Electronic Materials

1998

36

A four-level VLSI bipolar metallization design with chemical-mechanical planarization

W. L. Guthrie, W. Patrick, E. Levine,

IBM Journal of Research and Development

1992

29

Chemical Mechanical Polishing of Al and SiO2 Thin Films: The Role of Consumables

J. M. Hernandez, P. Wrschka, Y. Y. Hsu,

Journal of The Electrochemical Society

1999

28

Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization

Michael A. Fury, D.L. Scherber, Matt Stell

MRS Bulletin

1995

10

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