Concepedia

Michael A. Fury

MA

7

Publications

281

Citations

7

H-Index

1992

Active since

Affiliations

Philips (United States)(Current)

Albany State University

University at Albany, State University of New York

Michael A. Fury is an author at Philips (United States) specializing in engineering, materials science, and materials engineering.

Top concepts

EngineeringMaterial ScienceMaterials EngineeringCorrosionMechanical EngineeringMicrostructureSurface ScienceSurface PolishingThin FilmsApplied Physics

Publications per year

1992–2000

7

Publications

7

The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics

Fan Zhang, Ahmed Busnaina, Michael A. Fury et al. · Journal of Electronic Materials · 2000 · 78 citations

Materials Science, Silicon Wafers, Engineering +9

Chemical Vapor Deposition of Copper for Multilevel Metallization

Alain E. Kaloyeros, Michael A. Fury · MRS Bulletin · 1993 · 58 citations

Materials Science, Materials Engineering, Engineering +6

Polishing Parameter Dependencies and Surface Oxidation of Chemical Mechanical Polishing of Al Thin Films

P. Wrschka, J. M. Hernandez, Y. Y. Hsu et al. · Journal of The Electrochemical Society · 1999 · 42 citations

Engineering, Polyurethane Pad, Oxidation Resistance +19

Chemical mechanical polishing of polymer films

Dan Towery, Michael A. Fury · Journal of Electronic Materials · 1998 · 36 citations

Materials Science, Engineering, Polymer Technology +7

A four-level VLSI bipolar metallization design with chemical-mechanical planarization

W. L. Guthrie, W. Patrick, E. Levine et al. · IBM Journal of Research and Development · 1992 · 29 citations

Engineering, Integrated Circuits, Four-level Wiring +18

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